Enhanced Properties of SAW Device Based on Beryllium Oxide Thin Films
نویسندگان
چکیده
The present study depicts the first-ever optimized surface acoustic wave (SAW) device based on Beryllium Oxide (BeO) thin film. feasibility of devices BeO/128° YX LiNbO3 layered structure has been examined theoretically. SAW phase velocity, electromechanical coupling coefficient, and temperature coefficient delay for are calculated. is found to exhibit optimum value velocity (4476 ms−1) (~9.66%) at BeO over layer thickness 0.08 λ. (0.08 λ)/128° made stable, by integrating it with negative (TCD) TeO3 0.026λ.
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ژورنال
عنوان ژورنال: Crystals
سال: 2021
ISSN: ['2073-4352']
DOI: https://doi.org/10.3390/cryst11040332